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Electro-Damp® – Active Vibration Isolation Systems

  • Electro-Damp® II
    Electro-Damp® II

    Electro-Damp® is the first commercial, active, vibration isolation system designed specifically to increase throughput, resolution, and yield in semiconductor manufacturing applications.

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  • PEPS® II
    PEPS® II

    PEPS® II improves and builds upon TMC’s patented PEPS® (Precision Electronic Positioning System). With the addition of a new digital controller, PEPS® II is easier to use, offers more features, and has an improved user interface.

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