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CSP Compact Sub-Hertz Pendulum

Compact Sub-Hertz Pendulum Vibration Isolation System
CSP®
Compact Sub-Hertz Pendulum 
Vibration Isolation System
The Compact Sub-Hertz Pendulum Vibration Isolation System (CSP®) is a very low frequency horizontal vibration isolation system.
Its uses include reducing the settling time of platforms subjected to horizontal (payload generated) impulses common to semiconductor manufacturing equipment.

Features
• An adjustable and stable horizontal resonant frequency which is both load-independent and insensitive to environmental changes. The frequency range can be adjusted from 1 Hz down to 0.5 Hz or below.
• Overall height under 17 in., less than half the length of a pendulum of the same frequency.
• A lightweight pendulum design dramatically reduces the "intermediate mass" resonance common to prior pendulum system designs; the total floating mass is only a few pounds and its associated resonance is above 20 Hz in most applications.
• Fully modular design fits TMC Micro-g® leg shells and allows for easy removal and main­tenance of the diaphragm assembly.
• Simple two-screw adjustment allows isolator's level to be adjusted with the payload floating. Adjustments are readily accessible on isolator's top plate.
• TMC's standard mechanical over­travel limit prevents dangerous diaphragm ruptures if the system is inflated unloaded.
• A horizontal damper provides excellent horizontal damping without increasing the system's resonant frequency.
• Reduced tilt-to-horizontal coupling makes the system ideal for use with TMC's line of active products – including the PEPS® II (Precision Electronic Positioning System) and our PEPS-VX® 3 degrees-of-freedom active cancellation system.
• An improved vertical damping characteristic due to the increased ratio of the surge tank (not shown) to top chamber volumes
• Available in a range of load capabilities from 250 lb to 2,500 lb per isolator
The Compact Sub-Hertz Pendulum Vibration Isolation System (CSP®) is a very low frequency horizontal vibration isolation system. Its uses include reducing the settling time of platforms subjected to horizontal (payload generated) impulses common to semiconductor manufacturing equipment.
The Compact Sub-Hertz Pendulum Vibration Isolation System (CSP®) is a very low frequency horizontal vibration isolation system. Its uses include reducing the settling time of platforms subjected to horizontal (payload generated) impulses common to semiconductor manufacturing equipment.