STACIS® III is the most advanced active vibration cancellation system. Employing advanced inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators,
Semiconductor manufacturing factories (fabs) incorporate a system of raised false floors to accommodate complex facilities requirements (plumbing, electrical cables, gas piping, etc.)
For conventional lab floors, isolating building floor vibration from large, tall tools presents an ergonomic challenge.