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STACIS® III

STACIS
STACIS® III
Active Piezoelectric Vibration Cancellation

Initially designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to semiconductor fabs, failure analysis labs, nanotechnology research, nanofabrication facilities, and materials research. 


STACIS III includes a new and improved digital controller, the DC-2020. With a new dual-core processor and Ethernet as well as USB serial ports on the front and rear panels, this new advanced control system provides the user with a modern and easy to use Graphical User Interface (GUI). 

With many hundreds of successful installations worldwide, STACIS is the ideal vibration cancellation system for the most vibration-sensitive instruments.